Science and Technology of Microbeams

Academic year

2025Year

Term

First Semester

Course title

Science and Technology of Microbeams

Class type

Lecture

Course title (ENG)

Science and Technology of Microbeams

Class code・Class name・Teaching forms

Z1300001 Science and Technology of Microbeams

Instructor

OHO Eisaku

Credits

2.0Credits

Day and Time

Tue.3Period

Campus

Hachioji Campus

Location

1E-106講義室

Relationship between diploma policies and this course

A) A high degree of specialized expertise　100%
B) The skills to use science and technology　0%
C) The ability to conduct research independently, knowledge pertaining to society and occupations, and sense of ethics required of engineers and researchers　0%
D) Creative skills in specific areas of specialization　0%

Goals and objectives

This course is designed for graduate students who may use scanning electron microscopy. Through a series of lectures and a brief laboratory session, it will provide a useful knowledge of the general purpose-SEM (scanning electron microscope, a type of charged particle beam system) as well as an introduction to variable-pressure and high-resolution SEMs. In addition, when we need to use the SEM signal more quantitatively, it is necessary to know more about SEM physics. In this course, I will attempt to provide this information in the simplest possible form.

Prerequisites

It is possible to take this course without the prerequisite.

Method Using AL・ICT

Support for self-learning using ICT／Not used

Class schedule

1)Introduction (Scanning electron microscope (SEM))
2)Generation of electrons and ions, Wave-particle duality
3)Electron guns
4)Movement of charged particles in an electric and/or magnetic field.
5)Electrostatic deflection, Electromagnetic deflection, Electrostatic lens, Magnetic lens
6)Electron-probe formation
7)Electron-specimen interactions
8)Detector systems, Imaging modes
9)Radiation damage by electron beam, Specimen charging, Contamination, Disturbance
10) Ultra-high resolution SEM, Critical-dimension SEM
11)Variable-pressure SEM
12)Electron beam lithography
13)Digital image processing techniques for the field of SEM
14)Examination
15)Reviewing of the course

Evaluation

Students must pass the examination.

Feedback for students

That will be evaluated in the last class.

Textbooks

パワーポイント教材を使います。必要に応じてプリント，文献等を配布します。

Reference materials

新・走査電子顕微鏡（日本顕微鏡学会関東支部編、共立出版）

Office hours and How to contact teachers for questions

First-semester: Thursday 11:40〜12:20 at 13-303.
I may be able to answer your simple question after the class.

Message for students

Course by professor with work experience

Not applicable

Work experience and relevance to the course content if applicable

Teaching profession course

Electrical Engineering and Electronics Program

Syllabus data