2026Year

First Semester

Advanced Course of Microsystem Engineering

Lecture

Advanced Course of Microsystem Engineering

Z1300002 Advanced Course of Microsystem Engineering

SUZUKI Kenji

2.0Credits

Tue.3Period

Hachioji Remote

A) A high degree of specialized expertise　100%
B) The skills to use science and technology　0%
C) The ability to conduct research independently, knowledge pertaining to society and occupations, and sense of ethics required of engineers and researchers　0%
D) Creative skills in specific areas of specialization　0%

This is a graduate-level course on microsystems technology. Upon completion of this course, students should be able to:
・demonstrate an understanding of the fundamental principles of fabrication technology, actuators, sensors, scaling effects, and the science and engineering of microsystems.
・read research papers on microsystems written in English and prepare summary reports, thereby deepening their understanding of microsystems and improving their English reading comprehension and academic writing skills.

Students are expected to have a basic understanding of the four core areas of mechanics, measurement engineering, and mechatronics studied at the undergraduate level.

Support for self-learning using ICT

1. Overview of microsystems
2. Scaling effects
3. Microfabrication (Photolithography and etching)
4. Microfabrication (Thin film deposition)
5. MEMS mechanical sensors
6. MEMS sensors and its application to IoT
7. Electrostatic and piezoelectric actuators
8. Features of various microactuators
9. Microstructured functional surfaces
10. Structures and functions of biological surfaces
11. Biomimetics and microrobots
12. Microsystems design
13. Applications of microsystems
14. Reading comprehension of a research paper and report preparing
15. Reviewing of the course

The score is evaluated based on the results of quizzes conducted in each class and the final report, at a ratio of 6:4.

Feedback on the reports assigned in each class will be provided at the beginning of the following class.
Comments on the final report will be given during the review session in the last class.

not specified

江刺正喜　著, 「はじめてのMEMS」, 森北出版，2011.
諸貫信行　著，「微細構造から考える表面機能」，森北出版，2011.

Wednesday, 14:00〜16:00,
16-121, Building No.16 (Micro & Bio Systems Research Center), Hachioji Campus

Since the microtechnologies can play an important role in developing many other technologies in a wide range of fields, students should understand basic concepts of microsystems.

Not applicable

Mechanical Engineering Program