Syllabus data
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Teacher name ： SUZUKI Kenji
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Academic year
2025Year
Term
First Semester
Course title
Advanced Course of Microsystem Engineering
Class type
Lecture
Course title (ENG)
Advanced Course of Microsystem Engineering
Class code・Class name・Teaching forms
Z1300002 Advanced Course of Microsystem Engineering
Instructor
SUZUKI Kenji
Credits
2.0Credits
Day and Time
Tue.3Period
Campus
Hachioji Remote
Location
Relationship between diploma policies and this course
A) A high degree of specialized expertise 100%
B) The skills to use science and technology 0% C) The ability to conduct research independently, knowledge pertaining to society and occupations, and sense of ethics required of engineers and researchers 0% D) Creative skills in specific areas of specialization 0% Goals and objectives
This is a graduate-level microsystems technology course. On completion of this course, the student should be able to:
・have an awareness of basic knowledge related to fabrication technology, actuators, sensors, scaling effect, science and engineering for nano- and micro-systems. ・read a reserarch paper on microsystems writen in English and prepare report about a summary of the paper. This leads to a deep understanding about microsystems and improvement of English reading comprehension ability. Prerequisites
It is desirable to have learned fundamental matters of four mechanics, measurement engineering, and mechatronics.
Method Using AL・ICT
Support for self-learning using ICT
Class schedule
1. Overview of microsystems
2. Scaling effects 3. Microfabrication (Photolithography and etching) 4. Microfabrication (Thin film deposition) 5. MEMS mechanical sensors 6. MEMS sensors and its application to IoT 7. Electrostatic and piezoelectric actuators 8. Features of various microactuators 9. Microstructured functional surfaces 10. Structures and functions of biological surfaces 11. Biomimetics and microrobots 12. Microsystems design 13. Applications of microsystems 14. Reading comprehension of a research paper and report preparing 15. Reviewing of the course Evaluation
The score is evaluated by results of final report and quiz at the end of each lesson at a rate of 5:5.
Feedback for students
An answer of the quiz in each lesson is explained at the beginning of the next lesson.
The final report is reviewed in the last lesson. Textbooks
not specified
Reference materials
江刺正喜 著, 「はじめてのMEMS」, 森北出版，2011.
諸貫信行 著，「微細構造から考える表面機能」，森北出版，2011. Office hours and How to contact teachers for questions
Wednesday, 14:00〜16:00,
16-121, Building No.16 (Micro & Bio Systems Research Center), Hachioji Campus Message for students
Since the microtechnologies can play an important role in developing many other technologies in a wide range of fields, students should understand basic concepts of microsystems.
Course by professor with work experience
Not applicable
Work experience and relevance to the course content if applicable
Teaching profession course
Mechanical Engineering Program
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