Nano-Electronics Engineering

Academic year

2025Year

Term

First Semester

Course title

Nano-Electronics Engineering

Class type

Lecture

Course title (ENG)

Nano-Electronics Engineering

Class code・Class name・Teaching forms

Z1400003 Nano-Electronics Engineering

Instructor

SAKAMOTO Tetsuo

Credits

2.0Credits

Day and Time

Tue.6Period

Campus

Hachioji Remote

Location

Relationship between diploma policies and this course

A) A high degree of specialized expertise　100%
B) The skills to use science and technology　0%
C) The ability to conduct research independently, knowledge pertaining to society and occupations, and sense of ethics required of engineers and researchers　0%
D) Creative skills in specific areas of specialization　0%

Goals and objectives

Since the United States announced "National Nanotechnology Initiative = NNI", research development has been spread out rapidly. In this lecture, students learn about fabrication and measurement techniques for nanotechnology especially in electronics.

Prerequisites

Students studying semiconductors, material sciences, MEMS, and surface analysis techniques are suitable.

Method Using AL・ICT

Not used

Class schedule

1) History of Precise Processing
2) Basics of Nano-Technology (Top down and Bottom up)
3) Nano-structure and its nature (I) (3D, 2D structures)
4) Nano-structure and its nature (II) (1D, 0D structures)
5) Fabrication of Atomic-Scale Structure (Atom and Molecular Wiring, Switch)
6) Fabrication method for Nano-Structure (I) (Electron beam, Ion Beam, X-ray lithography)
7) Fabrication method for Nano-Structure (II) (MEMS, LIGA-process)
8) Industrial Synthesis method for Nano-Structure (fullerene, carbon-nanotube)
9) Nano-processing for Si (Surface treatment, imprint, etching, doping)
10) Measurement techniques I (Atomic arrangement)
11) Measurement techniques II (Morphology, Roughness)
12) Measurement techniques III (Element Analysis, part I)
13) Measurement techniques IV (Element Analysis, part II)
14) Future of the Nano-technology I
15) Future of the Nano-technology II

Evaluation

Evaluated after reviewing reports. Theme will be given in the lecture.

Feedback for students

In 15th lecture, the outlook of nanoelectronics will be discussed. And, the whole of the lecture will be reviewed.

Textbooks

Not announced.

Reference materials

Nanotechnology Handbook, Maruzen (in Japanese)

Office hours and How to contact teachers for questions

Tuesday 17:00-19:00, 5th bld, rm701 in Hachioji-campus

Message for students

Nanotechnology is rather new field. But it is based on the traditional technique and knowledge. It is useful not only for electric and electronics, but also chemistry and mechanics.

Course by professor with work experience

Not applicable

Work experience and relevance to the course content if applicable

Teaching profession course

Electrical Engineering and Electronics Program

Syllabus data